| LDR | 01409cam a2200361 a 4500 | ||
| 001 | 006865960 | ||
| 003 | MiAaHDL | ||
| 005 | 20221205000000.0 | ||
| 006 | m d | ||
| 007 | cr bn ---auaua | ||
| 008 | 780210s1978 dcua b f000 0 eng | ||
| 010 | ⊔ | ⊔ | ‡a78002200 |
| 029 | 1 | ⊔ | ‡aNZ1 ‡b12270602 |
| 029 | 1 | ⊔ | ‡aAU@ ‡b000001139174 |
| 029 | 1 | ⊔ | ‡aNLGGC ‡b113100914 |
| 035 | ⊔ | ⊔ | ‡a(MiU)990068659600106381 |
| 035 | ⊔ | ⊔ | ‡asdr-miu.990068659600106381 |
| 035 | ⊔ | ⊔ | ‡asdr-ucr991008021129704706 |
| 035 | ⊔ | ⊔ | ‡asdr-uiuc260706 |
| 035 | ⊔ | ⊔ | ‡z(MiU)MIU01000000000000006865960-goog |
| 035 | ⊔ | ⊔ | ‡a(OCoLC)3706822 |
| 035 | ⊔ | ⊔ | ‡z(MiU)Aleph006865960 |
| 040 | ⊔ | ⊔ | ‡aDLC ‡cDLC ‡dOCLCQ ‡dBTCTA ‡dNSBSP |
| 049 | ⊔ | ⊔ | ‡aNSBA |
| 086 | 0 | ⊔ | ‡aC 13.10:400-30 |
| 100 | 1 | ⊔ | ‡aChristou, A. |
| 245 | 1 | 0 | ‡aAutomated scanning low-energy electron probe (ASLEEP) for semiconductor wafer diagnostics / ‡cA. Christou. |
| 246 | 1 | 6 | ‡aSemiconductor measurement technology. |
| 260 | ⊔ | ⊔ | ‡aWashington, D.C. : ‡bU.S. Dept. of Commerce, National Bureau of Standards : ‡bFor sale by the Supt. of Docs., U.S. Govt. Print. Off., ‡c1978. |
| 300 | ⊔ | ⊔ | ‡av, 32 p. : ‡bill. ; ‡c26 cm. |
| 490 | 0 | ⊔ | ‡aU.S. Department of Commerce National Bureau of Standards special publication ; ‡v400-30 |
| 504 | ⊔ | ⊔ | ‡aIncludes bibliographical references. |
| 538 | ⊔ | ⊔ | ‡aMode of access: Internet. |
| 650 | ⊔ | 0 | ‡aSemiconductor wafers ‡xTesting. |
| 650 | ⊔ | 0 | ‡aProbes (Electronic instruments) |
| 710 | 1 | ⊔ | ‡aUnited States. ‡bNational Bureau of Standards. ‡tSpecial publication. |
| 899 | ⊔ | ⊔ | ‡a39015077585126 |
| CID | ⊔ | ⊔ | ‡a006865960 |
| DAT | 0 | ⊔ | ‡b20221205000000.0 |
| DAT | 1 | ⊔ | ‡a20221207140737.0 ‡b2024-02-23T18:53:04Z |
| CAT | ⊔ | ⊔ | ‡aSDR-MIU ‡cmiu ‡dALMA ‡lprepare.pl-004-008 |
| FMT | ⊔ | ⊔ | ‡aBK |
| HOL | ⊔ | ⊔ | ‡0sdr-miu.990068659600106381 ‡aMiU ‡bSDR ‡cGWLA ‡f006865960 ‡pmdp.39015077585126 ‡sMIU ‡1990068659600106381 |
| 974 | ⊔ | ⊔ | ‡bMIU ‡cGWLA ‡d20240223 ‡sgoogle ‡umdp.39015077585126 ‡y1978 ‡rpd ‡qbib ‡tUS fed doc |
| 974 | ⊔ | ⊔ | ‡bUC ‡cUCR ‡d20241025 ‡sgoogle ‡uuc1.31210014931214 ‡y1978 ‡rpd ‡qbib ‡tUS fed doc |
| 974 | ⊔ | ⊔ | ‡bUIU ‡cUIUC ‡d20250101 ‡sgoogle ‡uuiug.30112104130700 ‡z400-30 ‡y1978 ‡rpd ‡qbib ‡tUS fed doc |