Some aspects of dose measurement for accurate ion implantation /
Douglas M. Jamba.

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Main Author: Jamba, Douglas M.
Related Names: United States. National Bureau of Standards.
Language(s): English
Published: Washington, D.C. : U.S. Dept. of Commerce, National Bureau of Standards : 1977.
Subjects: Ion implantation.
Radiation dosimetry.
Physical Description: vii, 36 p. : ill. ; 26 cm.
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