Advances in chemical-mechanical polishing :
symposium held April 13-15, 2004, San Francisco, California, U.S.A. /
editors, Duane S. Boning ... [et al.].

Description

Related Names

Boning, Duane S.
Materials Research Society. Meeting

Language(s)

English

Published

Warrendale, Pa. : Materials Research Society, c2004.

Subjects

Grinding and polishing > Grinding and polishing / Congresses.
Electrolytic polishing > Electrolytic polishing / Congresses.

Note

"The papers here were presented at Symposium K, 'Advances in Chemical-Mechanical Polishing,' held April 13-15 at the 2004 MRS Spring Meeting in San Francisco, California ..."--p. xi.

Physical Description

xi, 292 p. : ill. ; 24 cm.

ISBN

1558997660

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