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‡aAdvances in chemical-mechanical polishing :
‡bsymposium held April 13-15, 2004, San Francisco, California, U.S.A. /
‡ceditors, Duane S. Boning ... [et al.].
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‡aWarrendale, Pa. :
‡bMaterials Research Society,
‡cc2004.
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‡axi, 292 p. :
‡bill. ;
‡c24 cm.
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‡aMaterials Research Society symposium proceedings ;
‡vv. 816
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‡a"The papers here were presented at Symposium K, 'Advances in Chemical-Mechanical Polishing,' held April 13-15 at the 2004 MRS Spring Meeting in San Francisco, California ..."--p. xi.
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‡aIncludes bibliographical references and index.
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‡aMode of access: Internet.
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‡aGrinding and polishing
‡vCongresses.
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‡aElectrolytic polishing
‡vCongresses.
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‡aBoning, Duane S.
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‡aMaterials Research Society.
‡bMeeting
‡d(2004 :
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