Advances in chemical-mechanical polishing : symposium held April 13-15, 2004, San Francisco, California, U.S.A.

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245 0 0 ‡aAdvances in chemical-mechanical polishing : ‡bsymposium held April 13-15, 2004, San Francisco, California, U.S.A. / ‡ceditors, Duane S. Boning ... [et al.].
260 ‡aWarrendale, Pa. : ‡bMaterials Research Society, ‡cc2004.
300 ‡axi, 292 p. : ‡bill. ; ‡c24 cm.
490 0 ‡aMaterials Research Society symposium proceedings ; ‡vv. 816
500 ‡a"The papers here were presented at Symposium K, 'Advances in Chemical-Mechanical Polishing,' held April 13-15 at the 2004 MRS Spring Meeting in San Francisco, California ..."--p. xi.
504 ‡aIncludes bibliographical references and index.
538 ‡aMode of access: Internet.
650 0 ‡aGrinding and polishing ‡vCongresses.
650 0 ‡aElectrolytic polishing ‡vCongresses.
700 1 ‡aBoning, Duane S.
710 2 ‡aMaterials Research Society. ‡bMeeting ‡d(2004 : ‡cSan Francisco, Calif.)
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