Semiconductor measurement technology :
techniques for measuring the integrity of passivation overcoats on integrated circuits /
Werner Kern and Robert B. Comizzoli ; RCA Laboratories.

Description

Main Author

Kern, Werner, 1925-

Related Names

Comizzoli, Robert B., jt. auth.
Radio Corporation of America. Laboratories Division.
United States. Defense Advanced Research Projects Agency.
United States. National Bureau of Standards.

Language(s)

English

Published

Washington : Dept. of Commerce, National Bureau of Standards : for sale by the Supt. of Docs., U.S. Govt. Print. Off., 1977.

Subjects

Microelectronics > Microelectronics / Quality control.
Protective coatings > Protective coatings / Testing.
Integrated circuits > Integrated circuits / Passivation.

Physical Description

xiv, 105 [1] p. : ill. ; 26 cm.

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