Microsystems engineering :
metrology and inspection /
sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by EOS--European Optical Society, WLT--Wissenschaftliche Gesellschaft Lasertechnik e.V. (Germany).

Description

Related Names

Wissenschaftliche Gesellschaft Lasertechnik.
European Optical Society.
Society of Photo-Optical Instrumentation Engineers.

Language(s)

English

Published

Bellingham, Wash. : SPIE, c2001-

Subjects

Measurement > Measurement / Congresses.
Interferometry > Interferometry / Congresses.
Microelectromechanical systems > Microelectromechanical systems / Congresses.
Microelectronics > Microelectronics / Congresses.
Optical detectors > Optical detectors / Industrial applications > Optical detectors / Industrial applications / Congresses.
Quality control > Quality control / Optical methods > Quality control / Optical methods / Congresses.

Note

Latest issue consulted: 3 (23-25 June 2003).
Also issued online.

Physical Description

v. : ill. ; 28 cm.

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