Lithography for semiconductor manufacturing.

Description

Related Names

Society of Photo-optical Instrumentation Engineers.
European Optical Society.

Language(s)

English

Published

Bellingham, Wash. : SPIE, c1999-

Subjects

Microlithography > Microlithography / Congresses.
Semiconductors > Semiconductors / Etching > Semiconductors / Etching / Congresses.
Integrated circuits > Integrated circuits / Design and construction > Integrated circuits / Design and construction / Congresses.

Note

Conference for 1999- sponsored by EOS--European Optical Society, SPIE--the International Society for Optical Engineering, [et al.].

Physical Description

v. : ill. ; 28 cm.

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