MAM '97, abstracts booklet :
European Workshop: Materials for Advanced Metallization, Villard-de-Lans, France, March 16-19, 1997.

Description

Meeting Name

European Workshop: Materials for Advanced Metallization Villard-de-Lans, France) (1997 :

Related Names

IEEE Electron Devices Society.
France. Ministère de l'éducation nationale, de l'enseignement supérieur, de la recherche et de l'insertion professionnelle.
International Union for Vacuum Science, Technique and Applications.

Language(s)

English

Published

Paris, France : Société française du vide, 1997.

Subjects

Semiconductor-metal boundaries > Semiconductor-metal boundaries / Congresses.
Metallizing > Metallizing / Congresses.
Integrated circuits > Integrated circuits / Very large scale integration > Integrated circuits / Very large scale integration / Design and construction > Integrated circuits / Very large scale integration / Design and construction / Congresses.

Note

"IEEE Catalog number 97TH8287."
"Supplément à la revue no 283"--Cover.
"With the sponsorship of IUVSTA (International Union for Vacuum Science, Technique and Applications), Ministère de l'éducation nationale, de l'enseignement supérieur et de la recherche, IEEE-EDS"--1st prelim. p.

Physical Description

221 p. : ill. ; 24 cm.

ISBN

0780339762

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