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| 003 | MiAaHDL | ||
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| 006 | m d | ||
| 007 | cr bn ---auaua | ||
| 008 | 990118s1997 fr a b 101 0 eng | ||
| 010 | ⊔ | ⊔ | ‡a97229275 //r98 |
| 020 | ⊔ | ⊔ | ‡a0780339762 ‡q(IEEE : microfiche) |
| 035 | ⊔ | ⊔ | ‡a(MiU)990033138420106381 |
| 035 | ⊔ | ⊔ | ‡asdr-miu.990033138420106381 |
| 035 | ⊔ | ⊔ | ‡a(OCoLC)38217323 |
| 035 | ⊔ | ⊔ | ‡z(MiU)Aleph003313842 |
| 040 | ⊔ | ⊔ | ‡aDLC ‡cDLC ‡dEYM |
| 050 | 0 | 0 | ‡aTK7874 ‡b.E797 1997 |
| 082 | 0 | 0 | ‡a621.39/5 ‡221 |
| 111 | 2 | ⊔ | ‡aEuropean Workshop: Materials for Advanced Metallization ‡d(1997 : ‡cVillard-de-Lans, France) |
| 245 | 1 | 0 | ‡aMAM '97, abstracts booklet : ‡bEuropean Workshop: Materials for Advanced Metallization, Villard-de-Lans, France, March 16-19, 1997. |
| 246 | 0 | 7 | ‡aMaterials for advanced metallization |
| 260 | ⊔ | ⊔ | ‡aParis, France : ‡bSociété française du vide, ‡c1997. |
| 300 | ⊔ | ⊔ | ‡a221 p. : ‡bill. ; ‡c24 cm. |
| 500 | ⊔ | ⊔ | ‡a"IEEE Catalog number 97TH8287." |
| 500 | ⊔ | ⊔ | ‡a"Supplément à la revue no 283"--Cover. |
| 500 | ⊔ | ⊔ | ‡a"With the sponsorship of IUVSTA (International Union for Vacuum Science, Technique and Applications), Ministère de l'éducation nationale, de l'enseignement supérieur et de la recherche, IEEE-EDS"--1st prelim. p. |
| 504 | ⊔ | ⊔ | ‡aIncludes bibliographical references and index. |
| 538 | ⊔ | ⊔ | ‡aMode of access: Internet. |
| 650 | ⊔ | 0 | ‡aSemiconductor-metal boundaries ‡xCongresses. |
| 650 | ⊔ | 0 | ‡aMetallizing ‡vCongresses. |
| 650 | ⊔ | 0 | ‡aIntegrated circuits ‡xVery large scale integration ‡xDesign and construction ‡xCongresses. |
| 710 | 2 | ⊔ | ‡aIEEE Electron Devices Society. |
| 710 | 1 | ⊔ | ‡aFrance. ‡bMinistère de l'éducation nationale, de l'enseignement supérieur, de la recherche et de l'insertion professionnelle. |
| 710 | 2 | ⊔ | ‡aInternational Union for Vacuum Science, Technique and Applications. |
| CID | ⊔ | ⊔ | ‡a003313842 |
| DAT | 0 | ⊔ | ‡a19990118000000.0 ‡b20210817000000.0 |
| DAT | 1 | ⊔ | ‡a20210919060712.0 ‡b2023-07-10T17:48:47Z |
| CAT | ⊔ | ⊔ | ‡aSDR-MIU ‡dALMA ‡lprepare.pl-004-008 |
| FMT | ⊔ | ⊔ | ‡aBK |
| HOL | ⊔ | ⊔ | ‡0sdr-miu.990033138420106381 ‡aMiU ‡bSDR ‡cMIU ‡pmdp.39015039831741 ‡sMIU ‡z97TH8287 1997 ‡1990033138420106381 |
| 974 | ⊔ | ⊔ | ‡bMIU ‡cMIU ‡d20230710 ‡sgoogle ‡umdp.39015039831741 ‡z97TH8287 1997 ‡y1997 ‡ric ‡qbib ‡tnon-US bib date1 >= 1929 |