Ion implantation in semiconductors, silicon and germanium
[by] James W. Mayer, Lennart Eriksson and John A. Davies. -

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Main Author: Mayer, James W., 1930-
Related Names: Davies, John Arthur, 1927-, joint author.
Eriksson, Lennart, 1938-, joint author.
Language(s): English
Published: New York: Academic Press, 1970.
Subjects: Semiconductors
Ion implantation
Physical Description: xiii, 280 p.: illus.; 24 cm.
ISBN: 0124808506
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Item Link	Original Source
Limited (search only)	University of Michigan
Limited (search only)	University of California

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