Material characterization techniques for integrated circuit processing :
[a short course] March 19-21, 1984, San Mateo, California /
Continuing Education for Engineering, University Extension, and the College of Engineering, University of California, Berkeley.

APA Citation

University of California, B. College of Engineering., University of California, B. Continuing Education in Engineering. (1984). Material characterization techniques for integrated circuit processing: [a short course] March 19-21, 1984, San Mateo, California. Berkeley, Calif.: Continuing Education in Engineering, University Extension.

MLA Citation

University of California, Berkeley. College of Engineering, and Berkeley. Continuing Education in Engineering University of California. Material Characterization Techniques for Integrated Circuit Processing: [a Short Course] March 19-21, 1984, San Mateo, California. Berkeley, Calif.: Continuing Education in Engineering, University Extension, 1984.