Fundamentals of high-resolution lithography, February 23, 1979, San Francisco /
Continuing Education in Engineering, University Extension, and the College of Engineering, University of California, Berkeley.

APA Citation

University of California, B. College of Engineering., University of California, B. Continuing Education in Engineering. (1979). Fundamentals of high-resolution lithography, February 23, 1979, San Francisco. Berkeley: Continuing Education in Engineering, University Extension, University of California.

MLA Citation

University of California, Berkeley. College of Engineering, and Berkeley. Continuing Education in Engineering University of California. Fundamentals of High-resolution Lithography, February 23, 1979, San Francisco. Berkeley: Continuing Education in Engineering, University Extension, University of California, 1979.