Fundamentals of high-resolution lithography, February 23, 1979, San Francisco

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245	0	0	‡aFundamentals of high-resolution lithography, February 23, 1979, San Francisco / ‡cContinuing Education in Engineering, University Extension, and the College of Engineering, University of California, Berkeley.
260	⊔	⊔	‡aBerkeley : ‡bContinuing Education in Engineering, University Extension, University of California, ‡c1979.
300	⊔	⊔	‡aapproximately 250 pages : ‡billustrations ; ‡c28 cm
336	⊔	⊔	‡atext ‡btxt ‡2rdacontent
337	⊔	⊔	‡aunmediated ‡bn ‡2rdamedia
338	⊔	⊔	‡avolume ‡bnc ‡2rdacarrier
504	⊔	⊔	‡aIncludes bibliographical references.
538	⊔	⊔	‡aMode of access: Internet.
650	⊔	7	‡aPhotolithography. ‡2fast ‡0(OCoLC)fst01062032
650	⊔	7	‡aLithography. ‡2fast ‡0(OCoLC)fst01000265
650	⊔	7	‡alithography. ‡2aat
650	⊔	7	‡aphotolithography. ‡2aat
650	⊔	6	‡aLithographie.
650	⊔	6	‡aPhotolithographie.
650	⊔	0	‡aLithography.
650	⊔	0	‡aPhotolithography.
710	2	⊔	‡aUniversity of California, Berkeley. ‡bCollege of Engineering.
710	2	⊔	‡aUniversity of California, Berkeley. ‡bContinuing Education in Engineering.
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