<?xml version="1.0" encoding="UTF-8"?><collection xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns="http://www.loc.gov/MARC21/slim" xsi:schemaLocation="http://www.loc.gov/MARC21/slim http://www.loc.gov/standards/marcxml/schema/MARC21slim.xsd"><record><leader>02857cam a2200529Ii 4500</leader><controlfield tag="001">102857174</controlfield><controlfield tag="003">MiAaHDL</controlfield><controlfield tag="005">20250726000000.0</controlfield><controlfield tag="006">m        d        </controlfield><controlfield tag="007">cr bn ---auaua</controlfield><controlfield tag="008">090723e196710  ohua    rbt  f000 0 eng d</controlfield><datafield tag="019" ind1=" " ind2=" "><subfield code="a">11335698</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(MiU)99187539754306381</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">sdr-miu.99187539754306381</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)427564499</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(GWLA)gwla ocn427564499</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">LHL</subfield><subfield code="b">eng</subfield><subfield code="c">LHL</subfield><subfield code="d">NDD</subfield><subfield code="d">OCLCF</subfield><subfield code="d">OCLCO</subfield><subfield code="d">OCLCQ</subfield><subfield code="d">TRAAL</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">MAIN</subfield></datafield><datafield tag="050" ind1=" " ind2="4"><subfield code="a">TK7870</subfield><subfield code="b">.M18</subfield></datafield><datafield tag="082" ind1="0" ind2="4"><subfield code="a">621.3817</subfield><subfield code="b">M149, R454, 1967</subfield></datafield><datafield tag="086" ind1="0" ind2=" "><subfield code="a">D 301.45/47-2:67-226</subfield></datafield><datafield tag="088" ind1=" " ind2=" "><subfield code="a">AD 0660590</subfield></datafield><datafield tag="088" ind1=" " ind2=" "><subfield code="a">AFML TR 67-226</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Macha, Milo,</subfield><subfield code="e">author.</subfield></datafield><datafield tag="245" ind1="1" ind2="2"><subfield code="a">A review of ceramic thin film technology /</subfield><subfield code="c">Milo Macha.</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Wright-Patterson Air Force Base, Ohio :</subfield><subfield code="b">Air Force Materials Laboratory, Directorate of Laboratories, Air Force Systems Command, United States Air Force,</subfield><subfield code="c">1967.</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">xvii, 147 pages :</subfield><subfield code="b">illustrations ;</subfield><subfield code="c">27 cm.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="a">text</subfield><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="a">unmediated</subfield><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="a">volume</subfield><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Air Force Materials Laboratory (U.S.). Technical Report ;</subfield><subfield code="v">AFML TR 67-226</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">AD0660590 (from http://www.dtic.mil).</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">"This final report has been prepared by the Librascope Group, General Precision Systems Inc., under Contract AF 33(615)-5188, Project No. 7381, Task No. 738105."</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">"General Precision Systems Inc."</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">"October 1967."</subfield></datafield><datafield tag="504" ind1=" " ind2=" "><subfield code="a">Includes bibliographical references (pages 135-147).</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">The report comprises a detailed description of the materials, techniques and problems in each of the three major areas of thin film applications--dielectrics, magnetics and semiconductors. Included in the report are also basic theories necessary for a complete understanding of the physical and chemical processes related to the areas of interest. Theoretical analysis leads to a description of the critical physical, chemical and structural requirements of films for device applications. The state of the art of all aspects of ceramic thin film technology is critically reviewed, and recommendations are suggested to overcome existing limitations.</subfield></datafield><datafield tag="533" ind1=" " ind2=" "><subfield code="a">Print reproduction.</subfield></datafield><datafield tag="538" ind1=" " ind2=" "><subfield code="a">Mode of access: Internet.</subfield></datafield><datafield tag="583" ind1="1" ind2=" "><subfield code="a">will digitize</subfield><subfield code="c">202010</subfield><subfield code="z">Queued for digitization October 1, 2020</subfield><subfield code="5">miu</subfield><subfield code="2">pda</subfield></datafield><datafield tag="650" ind1=" " ind2="0"><subfield code="a">Coatings.</subfield></datafield><datafield tag="650" ind1=" " ind2="0"><subfield code="a">Dielectrics.</subfield></datafield><datafield tag="650" ind1=" " ind2="0"><subfield code="a">Semiconductors.</subfield></datafield><datafield tag="650" ind1=" " ind2="0"><subfield code="a">Ceramic materials.</subfield></datafield><datafield tag="650" ind1=" " ind2="0"><subfield code="a">Thin films.</subfield></datafield><datafield tag="710" ind1="2" ind2=" "><subfield code="a">Air Force Materials Laboratory (U.S.),</subfield><subfield code="e">issuing agency.</subfield></datafield><datafield tag="710" ind1="2" ind2=" "><subfield code="a">General Precision Systems, Inc.</subfield><subfield code="b">Librascope Group,</subfield><subfield code="e">sponsor.</subfield></datafield><datafield tag="730" ind1="0" ind2=" "><subfield code="a">Technical Report Archive &amp; Image Library (TRAIL)</subfield></datafield><datafield tag="899" ind1=" " ind2=" "><subfield code="a">39015095329416</subfield></datafield><datafield tag="CID" ind1=" " ind2=" "><subfield code="a">102857174</subfield></datafield><datafield tag="DAT" ind1="0" ind2=" "><subfield code="a">20210401082104.0</subfield><subfield code="b">20250726000000.0</subfield></datafield><datafield tag="DAT" ind1="1" ind2=" "><subfield code="a">20260310140653.0</subfield><subfield code="b">2026-03-11T05:35:12Z</subfield></datafield><datafield tag="DAT" ind1="2" ind2=" "><subfield code="a">2024-06-22T17:30:02Z</subfield></datafield><datafield tag="CAT" ind1=" " ind2=" "><subfield code="a">SDR-MIU</subfield><subfield code="c">miu</subfield><subfield code="d">ALMA</subfield><subfield code="l">prepare.pl-004-009</subfield></datafield><datafield tag="FMT" ind1=" " ind2=" "><subfield code="a">BK</subfield></datafield><datafield tag="HOL" ind1=" " ind2=" "><subfield code="0">sdr-miu.99187539754306381</subfield><subfield code="a">MiU</subfield><subfield code="b">SDR</subfield><subfield code="c">GWLA</subfield><subfield code="p">mdp.39015095329416</subfield><subfield code="s">MIU</subfield><subfield code="1">99187539754306381</subfield></datafield><datafield tag="974" ind1=" " ind2=" "><subfield code="b">MIU</subfield><subfield code="c">GWLA</subfield><subfield code="d">20260311</subfield><subfield code="s">google</subfield><subfield code="u">mdp.39015095329416</subfield><subfield code="y">1967</subfield><subfield code="r">pd</subfield><subfield code="q">bib</subfield><subfield code="t">US fed doc</subfield></datafield></record></collection>