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| 082 | 0 | 4 | ‡a621.3817 ‡bM149, R454, 1967 |
| 086 | 0 | ⊔ | ‡aD 301.45/47-2:67-226 |
| 088 | ⊔ | ⊔ | ‡aAD 0660590 |
| 088 | ⊔ | ⊔ | ‡aAFML TR 67-226 |
| 100 | 1 | ⊔ | ‡aMacha, Milo, ‡eauthor. |
| 245 | 1 | 2 | ‡aA review of ceramic thin film technology / ‡cMilo Macha. |
| 264 | ⊔ | 1 | ‡aWright-Patterson Air Force Base, Ohio : ‡bAir Force Materials Laboratory, Directorate of Laboratories, Air Force Systems Command, United States Air Force, ‡c1967. |
| 300 | ⊔ | ⊔ | ‡axvii, 147 pages : ‡billustrations ; ‡c27 cm. |
| 336 | ⊔ | ⊔ | ‡atext ‡btxt ‡2rdacontent |
| 337 | ⊔ | ⊔ | ‡aunmediated ‡bn ‡2rdamedia |
| 338 | ⊔ | ⊔ | ‡avolume ‡bnc ‡2rdacarrier |
| 490 | 0 | ⊔ | ‡aAir Force Materials Laboratory (U.S.). Technical Report ; ‡vAFML TR 67-226 |
| 500 | ⊔ | ⊔ | ‡aAD0660590 (from http://www.dtic.mil). |
| 500 | ⊔ | ⊔ | ‡a"This final report has been prepared by the Librascope Group, General Precision Systems Inc., under Contract AF 33(615)-5188, Project No. 7381, Task No. 738105." |
| 500 | ⊔ | ⊔ | ‡a"General Precision Systems Inc." |
| 500 | ⊔ | ⊔ | ‡a"October 1967." |
| 504 | ⊔ | ⊔ | ‡aIncludes bibliographical references (pages 135-147). |
| 520 | ⊔ | ⊔ | ‡aThe report comprises a detailed description of the materials, techniques and problems in each of the three major areas of thin film applications--dielectrics, magnetics and semiconductors. Included in the report are also basic theories necessary for a complete understanding of the physical and chemical processes related to the areas of interest. Theoretical analysis leads to a description of the critical physical, chemical and structural requirements of films for device applications. The state of the art of all aspects of ceramic thin film technology is critically reviewed, and recommendations are suggested to overcome existing limitations. |
| 533 | ⊔ | ⊔ | ‡aPrint reproduction. |
| 538 | ⊔ | ⊔ | ‡aMode of access: Internet. |
| 583 | 1 | ⊔ | ‡awill digitize ‡c202010 ‡zQueued for digitization October 1, 2020 ‡5miu ‡2pda |
| 650 | ⊔ | 0 | ‡aCoatings. |
| 650 | ⊔ | 0 | ‡aDielectrics. |
| 650 | ⊔ | 0 | ‡aSemiconductors. |
| 650 | ⊔ | 0 | ‡aCeramic materials. |
| 650 | ⊔ | 0 | ‡aThin films. |
| 710 | 2 | ⊔ | ‡aAir Force Materials Laboratory (U.S.), ‡eissuing agency. |
| 710 | 2 | ⊔ | ‡aGeneral Precision Systems, Inc. ‡bLibrascope Group, ‡esponsor. |
| 730 | 0 | ⊔ | ‡aTechnical Report Archive & Image Library (TRAIL) |
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