A review of ceramic thin film technology /
Milo Macha.

Description

Main Author

Macha, Milo

Related Names

Air Force Materials Laboratory (U.S.)
General Precision Systems, Inc. Librascope Group

Language(s)

English

Published

Wright-Patterson Air Force Base, Ohio : Air Force Materials Laboratory, Directorate of Laboratories, Air Force Systems Command, United States Air Force, 1967.

Subjects

Coatings.
Dielectrics.
Semiconductors.
Ceramic materials.
Thin films.

Summary

The report comprises a detailed description of the materials, techniques and problems in each of the three major areas of thin film applications--dielectrics, magnetics and semiconductors. Included in the report are also basic theories necessary for a complete understanding of the physical and chemical processes related to the areas of interest. Theoretical analysis leads to a description of the critical physical, chemical and structural requirements of films for device applications. The state of the art of all aspects of ceramic thin film technology is critically reviewed, and recommendations are suggested to overcome existing limitations.

Note

AD0660590 (from http://www.dtic.mil).
"This final report has been prepared by the Librascope Group, General Precision Systems Inc., under Contract AF 33(615)-5188, Project No. 7381, Task No. 738105."
"General Precision Systems Inc."
"October 1967."

Physical Description

xvii, 147 pages : illustrations ; 27 cm.

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