00996nam a22002417a 4500100703894MiAaHDL20150601000000.0m d cr bn ---auaua850723 1984 cau eng dsdr-nrlf.b131137773GLADN50389052308t 1984 679T7.5.H8567(OCoLC)21748616Howe, Roger Thomas.Integrated silicon electromechanical vapor sensor /by Roger Thomas Howe.1984.vii, 184 leaves :ill. ;28 cm.Thesis (Ph. D. in Engineering Science)--University of California, Berkeley, Dec. 1984.Includes bibliographical references.Mode of access: Internet.University of California, Berkeley.Dept. of Engineering ScienceDissertations.Dissertations, AcademicUCBEngineering Science1981-1990.10070389419140701000000.020150601000000.020150602090610.02025-06-28T17:40:02Z2025-06-28T17:30:02ZSDR-NRLFIII - MILLENIUMloader.pl-003-020BKsdr-nrlf.b131137773uc1SDRNRLFuc1.c2935142UC.b131137773UCNRLF20250628googleuc1.c29351421984icbibUS bib date1 >= 1931