Integrated silicon electromechanical vapor sensor /
by Roger Thomas Howe.

Description

Main Author

Howe, Roger Thomas.

Language(s)

English

Published

1984.

Subjects

University of California, Berkeley. > University of California, Berkeley. / Dept. of Engineering Science > University of California, Berkeley. / Dept. of Engineering Science / Dissertations.

Physical Description

vii, 184 leaves : ill. ; 28 cm.

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