| LDR | 00808nam a2200193Mu 4500 | ||
| 001 | 011424347 | ||
| 003 | MiAaHDL | ||
| 005 | 20141013010000.0 | ||
| 006 | m d | ||
| 007 | cr bn ---auaua | ||
| 008 | 070423s1973 dcu 000 0 eng d | ||
| 035 | ⊔ | ⊔ | ‡asdr-uiuc6358259 |
| 035 | ⊔ | ⊔ | ‡a(OCoLC)315722257 |
| 040 | ⊔ | ⊔ | ‡aDEBSZ ‡erakwb ‡bger ‡cDEBSZ |
| 049 | ⊔ | ⊔ | ‡aUIUU |
| 245 | 1 | 0 | ‡aMethods of measurement for semiconductor materials, process control and devices : ‡bquarterly report, Oct. 1 to Dec. 31, 1972 / ‡ced.: W. Murray Bullis. |
| 260 | ⊔ | ⊔ | ‡aWashington, D.C. : ‡bNational Bureau of Standards, ‡c1973. |
| 300 | ⊔ | ⊔ | ‡aV, 49 S. |
| 490 | 0 | ⊔ | ‡aNational Bureau of Standards technical note ‡v773 |
| 538 | ⊔ | ⊔ | ‡aMode of access: Internet. |
| 700 | 1 | ⊔ | ‡aBullis, W. Murray. ‡4edt |
| CID | ⊔ | ⊔ | ‡a011424347 |
| DAT | 0 | ⊔ | ‡a20101001163446.0 ‡b20141013010000.0 |
| DAT | 1 | ⊔ | ‡a20141112173021.0 ‡b2023-04-20T18:03:55Z |
| DAT | 2 | ⊔ | ‡a2023-04-20T17:30:03Z ‡b2019-10-29T20:00:02Z |
| CAT | ⊔ | ⊔ | ‡aSDR-UIUC ‡dUNKNOWN ‡lloader.pl-003-020 |
| FMT | ⊔ | ⊔ | ‡aBK |
| HOL | ⊔ | ⊔ | ‡0sdr-uiuc6358259 ‡auiug ‡bSDR ‡cUIUC ‡puiug.30112106561209 ‡sUIU ‡16358259 |
| 974 | ⊔ | ⊔ | ‡bUIU ‡cUIUC ‡d20230420 ‡sgoogle ‡uuiug.30112106561209 ‡y1973 ‡rpdus ‡qgfv |