| LDR | 00826nam a2200253L 4500 | ||
| 001 | 011423978 | ||
| 003 | MiAaHDL | ||
| 005 | 20141013010000.0 | ||
| 006 | m d | ||
| 007 | cr bn ---auaua | ||
| 008 | 091205s1972 xx 000 u eng d | ||
| 029 | 0 | ⊔ | ‡aDKDLA ‡b28786929 |
| 035 | ⊔ | ⊔ | ‡asdr-uiuc6354605 |
| 035 | ⊔ | ⊔ | ‡a(OCoLC)473461498 |
| 040 | ⊔ | ⊔ | ‡aDKDLA ‡bdan ‡cDKDLA |
| 049 | ⊔ | ⊔ | ‡aUIUU |
| 080 | ⊔ | ⊔ | ‡a(04) |
| 080 | ⊔ | ⊔ | ‡a537.311.33 |
| 245 | 0 | 0 | ‡aMethods of measurement for semiconductor materials, process control, and devices. Quarterly report, July 1 to September 30, 1971. |
| 260 | ⊔ | ⊔ | ‡aWashington,D.C.,, ‡c1972. |
| 300 | ⊔ | ⊔ | ‡a48 s. |
| 490 | 0 | ⊔ | ‡aNational bureau of standards. Technical note ; ‡v717 |
| 500 | ⊔ | ⊔ | ‡a[Med bibl.]. |
| 538 | ⊔ | ⊔ | ‡aMode of access: Internet. |
| 700 | 1 | ⊔ | ‡aBullis, W. M. |
| 710 | 2 | ⊔ | ‡aNBS. |
| CID | ⊔ | ⊔ | ‡a011423978 |
| DAT | 0 | ⊔ | ‡a20100930163528.0 ‡b20141013010000.0 |
| DAT | 1 | ⊔ | ‡a20141112173021.0 ‡b2024-01-17T02:04:11Z |
| DAT | 2 | ⊔ | ‡a2024-01-16T18:30:02Z ‡b2019-10-29T20:00:02Z |
| CAT | ⊔ | ⊔ | ‡aSDR-UIUC ‡dUNKNOWN ‡lloader.pl-003-020 |
| FMT | ⊔ | ⊔ | ‡aBK |
| HOL | ⊔ | ⊔ | ‡0sdr-uiuc6354605 ‡auiug ‡bSDR ‡cUIUC ‡puiug.30112101585096 ‡sUIU ‡16354605 |
| 974 | ⊔ | ⊔ | ‡bUIU ‡cUIUC ‡d20240117 ‡sgoogle ‡uuiug.30112101585096 ‡y1972 ‡rpdus ‡qgfv |