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‡aNAS 1.12/7:400-442
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‡aFabrication and characterization capabilities of the Microdevices Laboratory.
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‡aPasadena, Calif. :
‡bNASA, Jet Propulsion Laboratory,
‡c1990.
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‡a32 p. :
‡bill. ;
‡c28 cm.
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‡a"JPL 400-442, 11/90"--P. 4 of cover.
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‡aShipping list no.: 91-060-P.
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‡aMode of access: Internet.
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‡aScientific apparatus and instruments
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‡aMicrocomputers
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‡aMicroelectronics
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‡aJet Propulsion Laboratory (U.S.)
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