Ion beam processes in advanced electronic materials and device technology :
symposium held April 15-18, 1985, San Francisco, California, U.S.A. /
editors, B.R. Appleton, F.H. Eisen, T.W. Sigmon.

Description

Tools

Cite this Export citation file
Related Names
Sigmon, T. W.
Eisen, Fred H.
Appleton, B. R.
Symposium on Ion Beam Processes in Advanced Electronic Materials and Device Technology San Francisco, Calif.) (1985 :
Language(s)
English
Published
Pittsburgh, Pa. : Materials Research Society, c1985.
Subjects
Ion implantation > Congresses.
Semiconductors > Congresses.
Note
"These proceedings are a referred account of the Symposium on Ion Beam Processes in Advanced Electronic Materials and Device Technology presented at the 1985 spring meeting of the Materials Research Society, April 15-18, 1985, in San Francisco, California."--Pref.
Physical Description
xv, 393 p. : ill. ; 24 cm.
ISBN
0931837103 :
Locate a Print Version
Find in a library

Viewability

Item Link Original Source
Limited (search only)   University of California