Polymers in microlithography :
materials and processes /
Elsa Reichmanis, editor, Scott A. MacDonald, editor, Takao Iwayanagi, editor.
APA Citation
Iwayanagi, T., MacDonald, S. A., Reichmanis, E., American Chemical Society. Division of Polymeric Materials: Science and Engineering. (1989). Polymers in microlithography: materials and processes. Washington, DC: American Chemical Society.
MLA Citation
Iwayanagi, Takao, 1949-, Scott A MacDonald, Elsa Reichmanis, and American Chemical Society. Division of Polymeric Materials: Science and Engineering. Polymers In Microlithography: Materials And Processes. Washington, DC: American Chemical Society, 1989.
Warning: These citations may not always be complete (especially for serials).