Polymers in microlithography : materials and processes

LDR 02081nam a2200493Ka 4500
001 010094848
003 MiAaHDL
005 20150330000000.0
006 m d
007 cr bn ---auaua
008 030617s1989 dcua b 101 0 eng
010 ⊔ ⊔ ‡a 89017931
020 ⊔ ⊔ ‡a0841217017 (alk. paper)
035 ⊔ ⊔ ‡asdr-nrlf.b171860172
035 ⊔ ⊔ ‡a(UCD)ADS-1100
035 ⊔ ⊔ ‡a(SBN)ADY7890
035 ⊔ ⊔ ‡a(SBN)ADY7890
035 ⊔ ⊔ ‡a(CStRLIN)CASX90-B1191
035 ⊔ ⊔ ‡aGLADN185061733
035 ⊔ ⊔ ‡a(CSCI)b11452961
040 ⊔ ⊔ ‡aDLC ‡cDLC ‡dDLC
050 0 0 ‡aTK7871.15.P6 ‡bP635 1989
082 0 0 ‡a621.381/531 ‡220
090 ⊔ ⊔ ‡aTK7871.15.P6 ‡bP635 1989
035 ⊔ ⊔ ‡a(OCoLC)809538832
245 0 0 ‡aPolymers in microlithography : ‡bmaterials and processes / ‡cElsa Reichmanis, editor, Scott A. MacDonald, editor, Takao Iwayanagi, editor.
260 0 ⊔ ‡aWashington, DC : ‡bAmerican Chemical Society, ‡c1989.
300 ⊔ ⊔ ‡axii, 449 p. : ‡bill. ; ‡c24 cm.
490 0 ⊔ ‡aACS symposium series, ‡x0097-6156 ; ‡v412
500 ⊔ ⊔ ‡a"Developed from a symposium sponsored by the Division of Polymeric Materials: Science and Engineering at the 197th national meeting of the American Chemical Society, Dallas, Texas, April 9-14, 1989."
504 ⊔ ⊔ ‡aIncludes bibliographical references.
538 ⊔ ⊔ ‡aMode of access: Internet.
650 ⊔ 0 ‡aMicrolithography ‡xMaterials ‡xCongresses.
650 ⊔ 0 ‡aPhotoresists ‡vCongresses.
650 ⊔ 0 ‡aPolymers ‡vCongresses.
700 1 0 ‡aIwayanagi, Takao, ‡d1949-
700 1 0 ‡aMacDonald, Scott A.
700 1 0 ‡aReichmanis, Elsa, ‡d1953-
710 2 0 ‡aAmerican Chemical Society. ‡bDivision of Polymeric Materials: Science and Engineering.
CID ⊔ ⊔ ‡a010094848
DAT 0 ⊔ ‡a19150319000000.0 ‡b20150330000000.0
DAT 1 ⊔ ‡a20150513124028.0 ‡b2023-12-21T19:11:49Z
DAT 2 ⊔ ‡a2023-12-21T18:30:02Z
CAT ⊔ ⊔ ‡aSDR-NRLF ‡dIII - MILLENIUM ‡lloader.pl-003-020
FMT ⊔ ⊔ ‡aBK
HOL ⊔ ⊔ ‡0sdr-nrlf.b171860172 ‡auc1 ‡bSDR ‡cNRLF ‡puc1.b4537598 ‡sUC ‡1.b171860172
974 ⊔ ⊔ ‡bUC ‡cNRLF ‡d20231221 ‡sgoogle ‡uuc1.b4537598 ‡y1989 ‡ric ‡qbib ‡tUS bib date1 >= 1929