Polymers in microlithography :
materials and processes /
Elsa Reichmanis, editor, Scott A. MacDonald, editor, Takao Iwayanagi, editor.

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Related Names
Iwayanagi, Takao, 1949-
MacDonald, Scott A.
Reichmanis, Elsa, 1953-
American Chemical Society. Division of Polymeric Materials: Science and Engineering.
Language(s)
English
Published
Washington, DC : American Chemical Society, 1989.
Subjects
Microlithography > Materials > Congresses.
Photoresists > Congresses.
Polymers > Congresses.
Note
"Developed from a symposium sponsored by the Division of Polymeric Materials: Science and Engineering at the 197th national meeting of the American Chemical Society, Dallas, Texas, April 9-14, 1989."
Physical Description
xii, 449 p. : ill. ; 24 cm.
ISBN
0841217017 (alk. paper)
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