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| 082 | 0 | 0 | ‡a621.3815/2/0287 ‡219 |
| 035 | ⊔ | ⊔ | ‡a(OCoLC)10837624 |
| 245 | 0 | 0 | ‡aSpectroscopic characterization techniques for semiconductor technology : ‡b9-10 November 1983, Cambridge, Massachusetts / ‡cFred H. Pollak, Robert S. Bauer, chairmen/editors |
| 260 | ⊔ | ⊔ | ‡aBellingham, Wash., USA : ‡bSPIE--International Society for Optical Engineering, ‡cc1984 |
| 300 | ⊔ | ⊔ | ‡avi, 203 p. : ‡bill. ; ‡c28 cm |
| 490 | ⊔ | 0 | ‡aProceedings of SPIE--the International Society for Optical Engineering ; ‡vv. 452 |
| 538 | ⊔ | ⊔ | ‡aMode of access: Internet. |
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| 650 | ⊔ | 0 | ‡aSemiconductors ‡xTesting ‡vCongresses |
| 700 | 1 | ⊔ | ‡aBauer, Robert S |
| 700 | 1 | ⊔ | ‡aPollak, Fred H |
| 710 | 2 | ⊔ | ‡aSociety of Photo-optical Instrumentation Engineers |
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