Direct simulation Monte Carlo modeling of silicon thin film deposition using supersonic beams /
by Gang Chen.
APA Citation
Chen, G. (1998). Direct simulation Monte Carlo modeling of silicon thin film deposition using supersonic beams. .
MLA Citation
Chen, Gang, 1969-. Direct Simulation Monte Carlo Modeling of Silicon Thin Film Deposition Using Supersonic Beams. , 1998.
Warning: These citations may not always be complete (especially for serials).