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‡aChen, Gang,
‡d1969-
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‡aDirect simulation Monte Carlo modeling of silicon thin film deposition using supersonic beams /
‡cby Gang Chen.
|
260 |
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⊔ |
‡cc1998.
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⊔ |
‡axiv, 209 leaves :
‡bill. ;
‡c29 cm.
|
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‡bPh.D.
‡cCornell University
‡dMay 1998
|
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⊔ |
⊔ |
‡aIncludes bibliographical references.
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538 |
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‡aMode of access: Internet.
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