Direct simulation Monte Carlo modeling of silicon thin film deposition using supersonic beams

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100 1 ‡aChen, Gang, ‡d1969-
245 1 0 ‡aDirect simulation Monte Carlo modeling of silicon thin film deposition using supersonic beams / ‡cby Gang Chen.
260 ‡cc1998.
300 ‡axiv, 209 leaves : ‡bill. ; ‡c29 cm.
502 ‡bPh.D. ‡cCornell University ‡dMay 1998
504 ‡aIncludes bibliographical references.
538 ‡aMode of access: Internet.
CID ‡a009235283
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