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‡aEdwards, William John.
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‡aDopant implantation and oxidation of polycrystalline silicon-germanium films /
‡cby William John Edwards.
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260 |
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‡c1996.
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300 |
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‡axiii, 145 leaves :
‡bill. ;
‡c29 cm.
|
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⊔ |
‡bPh.D.
‡cCornell University
‡dJanuary 1996
|
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⊔ |
⊔ |
‡aIncludes bibliographical references (leaves 140-145).
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538 |
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‡aMode of access: Internet.
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