Dopant implantation and oxidation of polycrystalline silicon-germanium films

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100 1 ‡aEdwards, William John.
245 1 0 ‡aDopant implantation and oxidation of polycrystalline silicon-germanium films / ‡cby William John Edwards.
260 ‡c1996.
300 ‡axiii, 145 leaves : ‡bill. ; ‡c29 cm.
502 ‡bPh.D. ‡cCornell University ‡dJanuary 1996
504 ‡aIncludes bibliographical references (leaves 140-145).
538 ‡aMode of access: Internet.
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