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‡aSmith, Paul Martin.
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‡aStabilization of thin tungsten films on silicon during rapid thermal annealing in nitrogen /
‡cby Paul Martin Smith.
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260 |
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‡c1991.
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300 |
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‡axii, 182 leaves :
‡bill. ;
‡c29 cm.
|
502 |
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‡bPh. D.
‡cCornell University
‡dAugust 1991
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‡aIncludes bibliographical references.
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538 |
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‡aMode of access: Internet.
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