Stabilization of thin tungsten films on silicon during rapid thermal annealing in nitrogen

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100 1 ‡aSmith, Paul Martin.
245 1 0 ‡aStabilization of thin tungsten films on silicon during rapid thermal annealing in nitrogen / ‡cby Paul Martin Smith.
260 ‡c1991.
300 ‡axii, 182 leaves : ‡bill. ; ‡c29 cm.
502 ‡bPh. D. ‡cCornell University ‡dAugust 1991
504 ‡aIncludes bibliographical references.
538 ‡aMode of access: Internet.
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