Evolution of silicon surface morphologies during aqueous fluorine etching

LDR 00583cam a22001817a 4500
001 009225092
003 MiAaHDL
005 20240401000000.0
006 m d
007 cr bn ---auaua
008 010329s2000 xx a b 000 0 eng d
035 ‡asdr-coo.3968727
035 ‡z(COO)Voyager3968727
035 ‡a(OCoLC)51597953
040 ‡aNIC ‡cNIC
100 1 ‡aHuang, Yi-Chiau, ‡d1969-
245 1 0 ‡aEvolution of silicon surface morphologies during aqueous fluorine etching / ‡cby Yi-Chiau Huang.
260 ‡cc2000.
300 ‡ax, 102 leaves : ‡bill. ; ‡c29 cm.
502 ‡bPh.D. ‡cCornell University ‡dAugust 2000
504 ‡aIncludes bibliographical references.
538 ‡aMode of access: Internet.
CID ‡a009225092
DAT 0 ‡a20220306144343.2 ‡b20240401000000.0
DAT 1 ‡a20240401142456.0 ‡b2024-06-26T17:45:08Z
CAT ‡aSDR-COO ‡ccoo ‡dFOLIO ‡lprepare.pl-004-008
FMT ‡aBK
HOL ‡0sdr-coo.3968727 ‡acoo ‡bSDR ‡cCOO ‡f3968727 ‡pcoo.31924088876879 ‡sCOO ‡13968727
974 ‡bCOO ‡cCOO ‡d20240626 ‡sgoogle ‡ucoo.31924088876879 ‡y2000 ‡ric ‡qbib ‡tnon-US bib date1 >= 1929