Microelectronic test pattern NBS-4 /
W. Robert Thurber and Martin G. Buehler.
|Main Author:||Thurber, W. Robert.|
|Related Names:||Buehler, Martin G.|
Washington, D.C. : U.S. Dept. of Commerce, National Bureau of Standards : 1978.
Semiconductors / Testing /
Equipment and supplies.
"This activity was supported by the Defense Advanced Research Projects Agency and the National Bureau of Standards."
vi, 83 p. :
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