Angular sensitivity of controlled implanted doping profiles /
Robert G. Wilson ... [et al.].

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Related Names: Wilson, Robert G.
Language(s): English
Published: [Washington] : U.S. Dept. of Commerce, National Bureau of Standards : 1978.
Subjects: Integrated circuits.
Ion implantation.
Semiconductor doping.
Physical Description: vii, 54 p. : ill. ; 26 cm.
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