Metrology for submicrometer devices and circuits /
W. Murray Bullis.

Description

Main Author

Bullis, W. Murray, 1930-

Related Names

United States. National Bureau of Standards.

Language(s)

English

Published

Washington, D.C. : U.S. Dept. of Commerce, National Bureau of Standards : 1980.

Subjects

Semiconductors > Semiconductors / Measurement.
Semiconductors > Semiconductors / Testing.
Integrated circuits > Integrated circuits / Measurement.
Integrated circuits > Integrated circuits / Testing.

Note

"Issued June 1980."

Physical Description

vi, 34 p. : ill. ; 26 cm.

ISBN

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