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‡aAnderson, Philip D.
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‡aAutomatic plasma processing control /
‡cby Philip D. Anderson.
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‡c1990.
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‡aviii, [112] leaves :
‡bill. ;
‡c29 cm.
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‡aTypescript.
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‡aThesis (M.S.)--University of Wisconsin--Madison, 1990.
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‡aIncludes bibliographical references (leaf 76).
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‡aMode of access: Internet.
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‡aDissertations, Academic
‡xNuclear Engineering and Engineering Physics.
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