Automatic plasma processing control

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003 MiAaHDL
005 20071024000000.0
006 m d
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035 ‡asdr-wu1882811
035 ‡a(OCoLC)23666614
040 ‡aGZM ‡cGZM
098 1 1 ‡aAWO ‡aA546 ‡aP455
100 1 0 ‡aAnderson, Philip D.
245 1 0 ‡aAutomatic plasma processing control / ‡cby Philip D. Anderson.
260 1 ‡c1990.
300 ‡aviii, [112] leaves : ‡bill. ; ‡c29 cm.
500 ‡aTypescript.
502 ‡aThesis (M.S.)--University of Wisconsin--Madison, 1990.
504 ‡aIncludes bibliographical references (leaf 76).
538 ‡aMode of access: Internet.
690 ‡aDissertations, Academic ‡xNuclear Engineering and Engineering Physics.
CID ‡a005718373
DAT 0 ‡a20071024102508.0 ‡b20071024000000.0
DAT 1 ‡a20120815133207.0 ‡b2023-06-23T18:30:56Z
CAT ‡aSDR-WU ‡dUNKNOWN ‡lloader.pl-001-001
FMT ‡aBK
HOL ‡0sdr-wu1882811 ‡awu ‡bSDR ‡cWU ‡pwu.89032857427 ‡sWU ‡11882811
974 ‡bWU ‡cWU ‡d20230623 ‡sgoogle ‡uwu.89032857427 ‡y1990 ‡ric ‡qbib ‡tnon-US bib date1 >= 1929