Nano- and micro-metrology :
16-17 June, 2005, Munich, Germany /
Heidi Ottevaere, Peter DeWolf, Diederick S. Wiersma ; sponsored by, SPIE Europe ; cooperating organizations, EOS--European Optical Society ... [et al.] ; published by SPIE--the International Society for Optical Engineering.
Description
Viewability
Item Link | Original Source |
---|---|
Limited (search only) | University of Michigan |