Principles of lithography /
Harry J. Levinson.

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Main Author
Levinson, Harry J.
Language(s)
English
Published
Bellingham, WA : SPIE Press, c2004.
Edition
2nd ed.
Subjects
Microlithography.
Integrated circuits > Design and construction.
Physical Description
xii, 423 p. : ill. ; 26 cm.
ISBN
9780819478832
9780819456601
0819456608
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Limited (search only)   University of Michigan