High-sensitivity, low-noise, multi-axis capacitive micro-accelerometers

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099 ‡aMiU diss
100 1 ‡aChae, Junseok.
245 1 0 ‡aHigh-sensitivity, low-noise, multi-axis capacitive micro-accelerometers.
260 ‡c2003.
300 ‡a1 v.
502 ‡aDissertation (Ph.D.)--University of Michigan.
538 ‡aMode of access: Internet.
650 4 ‡aElectrical Engineering.
730 0 ‡aDissertations & theses @ University of Michigan.
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