Catalog Record: A production-compatible microelectronic test pattern for evaluating photomask misalignment | HathiTrust Digital Library

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A production-compatible microelectronic test pattern for evaluating photomask misalignment /
T. J. Russell, D. A. Maxwell ; sponsored by the

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Main Author: Russell, T. J. 1943-
Related Names: Maxwell, Dwight A. , joint author.
Language(s): English
Published: Washington : U. S. Dept. of Commerce, National Bureau of Standards : for sale by the Supt. of Docs., U. S. Govt. Print. Off., 1979.
Subjects: Integrated circuits > Integrated circuits / Masks > Integrated circuits / Masks / Testing.
Physical Description: iii, 28 p. : ill. ; 26 cm.
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