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‡aIndo-Russian Workshop on Micromechanical Systems :
‡b2-4 February 1999, New Delhi, India /
‡cAlexander M. Prokhorov, V.S. Ramamurthy, chairs ; Vladimir I. Pustovoy, Vinoy K. Jain, editors ; organized by Solid State Physics Laboratory (India) ... [et al.] ; cosponsored by Defence Research and Development Organization (India) ... [et al.].
|
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‡aBellingham, Wash., USA :
‡bSPIE,
‡cc1999.
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‡c28 cm.
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‡aSPIE proceedings series ;
‡vv. 3903
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‡aIncludes bibliographical references and index.
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‡aMode of access: Internet.
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‡aMicroelectromechanical systems
‡xDesign and construction
‡vCongresses.
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‡aOptoelectronic devices
‡xMaterials
‡vCongresses.
|
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‡aOptoelectronic devices
‡xDesign and construction
‡vCongresses.
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‡aJain, Vinoy K.
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‡aPustovoy, Vladimir.
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‡aRamamurthy, V. S.
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‡aProkhorov, A. M.
‡q(Aleksandr Mikhaĭlovich),
‡d1916-
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‡aDefence Research & Development Organisation (India)
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‡aSolid State Physics Laboratory (India)
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‡aSociety of Photo-optical Instrumentation Engineers.
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