Semiconductor Manufacturing Technology Workshop :
[papers] /
[sponsored by IEEE Electron Devices Society, Taipei Chapter ... et al].
APA Citation
Semiconductor Manufacturing Technology Workshop., IEEE Control Systems Society., IEEE Electron Devices Society. Taipei Chapter. (1993). Semiconductor Manufacturing Technology Workshop: [papers]. Hsinchu, Taiwan: [s.n.].
MLA Citation
Semiconductor Manufacturing Technology Workshop, IEEE Control Systems Society, and IEEE Electron Devices Society. Taipei Chapter. Semiconductor Manufacturing Technology Workshop: [papers]. Hsinchu, Taiwan: [s.n.], 1993.
Warning: These citations may not always be complete (especially for serials).