Diagnostic techniques for semiconductor materials processing

LDR 01226nas a22003131a 4500
001 002880939
003 MiAaHDL
005 20240704000000.0
006 m d
007 cr bn ---auaua
007 cr bn ---auaaa
008 940929c19939999paugr 1 a0eng d
035 ‡a(MiU)990028809390106381
035 ‡asdr-miu.990028809390106381
035 ‡z(MiU)MIU01000000000000002880939-goog
035 ‡a(OCoLC)34535392
035 ‡z(MiU)Aleph002880939
040 ‡aMiU ‡cMiU
050 0 0 ‡aTK7871.85 ‡b.D497
245 0 0 ‡aDiagnostic techniques for semiconductor materials processing.
260 ‡aPittsburgh, Pa. : ‡bMaterials Research Society, ‡cc1994-
300 ‡av. : ‡bill. ; ‡c24 cm.
310 ‡aBiennial
362 0 ‡a[1] (Nov. 29-Dec. 2, 1993)-
490 0 ‡aMaterials Research Society symposium proceedings
500 ‡aVols. [1]- consist of papers presented at the 1993- symposiums on "Diagnostic Techniques for Semiconductor Materials Processing."
515 ‡aVol. numbering begins with: 2 (Nov. 27-30, 1995).
538 ‡aMode of access: Internet.
650 0 ‡aSemiconductors ‡xTesting ‡xCongresses.
710 2 ‡aMaterials Research Society.
730 0 ‡aMRS proceedings.
899 ‡a39015032557582 ‡c1993
CID ‡a002880939
DAT 0 ‡a20240603185704.0 ‡b20240704000000.0
DAT 1 ‡a20240704120241.0 ‡b2024-07-05T08:55:29Z
DAT 2 ‡a2023-04-30T17:30:02Z
CAT ‡aSDR-MIU ‡cmiu ‡dALMA ‡lprepare.pl-004-008
FMT ‡aSE
HOL ‡0sdr-miu.990028809390106381 ‡aMiU ‡bSDR ‡cMIU ‡f002880939 ‡pmdp.39015032557582 ‡sMIU ‡z1993 ‡1990028809390106381
974 ‡bMIU ‡cMIU ‡d20240705 ‡sgoogle ‡umdp.39015032557582 ‡z1993 ‡y1993 ‡ric ‡qbib ‡tUS serial item date >= 1929
974 ‡bMIU ‡cMIU ‡d20240705 ‡sgoogle ‡umdp.39015035262891 ‡z1995 ‡y1995 ‡ric ‡qbib ‡tUS serial item date >= 1929