Single chamber processing :
proceedings of the joint session on single chamber processing : requirements and challenges of the 1992 E-MRS Spring Meeting Conference, Strasbourg, France, June 2-5, 1992 /
edited by Yves I. Nissim, Avishay Katz.

Description

Corporate Author

European Materials Research Society. Meeting

Related Names

Katz, Avishay.
Nissim, Yves I., 1953-

Language(s)

English

Published

Amsterdam ; North-Holland, 1993.

Subjects

Vacuum technology > Vacuum technology / Congresses.
Semiconductors > Semiconductors / Design and construction > Semiconductors / Design and construction / Congresses.

Physical Description

x, 162 p. : ill. ; 29 cm.

ISBN

0444899154

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