03132nas a22006011a 4500002467445MiAaHDL20250726000000.0m d cr bn ---auaua910913c19909999cauar 1 a0eng d 96643156 1078-8743(MiU)990024674450106381sdr-miu.990024674450106381(MiU)MIU01000000000000002467445-goog(SFX)110978984444703(OCoLC)22962210(RLIN)MIUG91-S2412(WaSeSS)ejrnlssj0006981(MiU)Aleph002467445PUPUMiUUtOrBLWTK7871.85.I25a621.381520IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop.http://id.loc.gov/authorities/names/nr91003157http://id.loc.gov/rwo/agents/nr91003157ASMC proc.ASMC proceedingsASMC ... proceedings /IEEE/SEMI Advanced Manufacturing Conference and Workshop.IEEE/SEMI advanced semiconductor manufacturing conferenceProceedings, Advanced Semiconductor Manufacturing Conference and Workshop (ASMC)Advanced semiconductor manufacturing conference and workshopASMCProceedingsTitle on IEEE Xplore homepage:Advanced semiconductor manufacturing<2004->New York, NY :Institute of Electrical and Electronics Engineers,c1990-v. :ill. ;28 cmAnnualtexttxtrdacontentunmediatednrdamediavolumencrdacarrier1st ('90)-Some issues also have a distinctive theme title.Published: Mountain View, CA : SEMI, 1993-Also issued online.Mode of access: Internet.Sponsored by: Joint IEEE/SEMI Committee on Semiconductor Manufacturing, composed of: Semiconductor Equipment and Materials International, Electron Devices Society, and the Components, Hybrids, & Manufacturing Technology Society.Computer integrated manufacturing systemsCongresses.http://id.loc.gov/authorities/subjects/sh2008101489Semiconductor industryCongresses.SemiconductorsDesign and constructionCongresses.http://id.loc.gov/authorities/subjects/sh2008111516IEEE Electron Devices Society.http://id.loc.gov/authorities/names/n81070856http://id.loc.gov/rwo/agents/n81070856IEEE Components, Hybrids, and Manufacturing Technology Society.http://id.loc.gov/authorities/names/n78075303http://id.loc.gov/rwo/agents/n78075303Semiconductor Equipment and Materials International.http://id.loc.gov/authorities/names/n90682619http://id.loc.gov/rwo/agents/n90682619Joint IEEE/SEMI Committee on Semiconductor Manufacturing.IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop.ASMC ... proceedings (Online)ASMC proceedings (Online)3901501542907290CH2902-500246744520241217231745.020250726000000.020260225140649.02026-02-26T06:25:26Z2013-02-01T17:30:15ZSDR-MIUmiuALMAprepare.pl-004-009SEsdr-miu.990024674450106381MiUSDRMIU002467445mdp.39015015429072MIU90CH2902-5990024674450106381MIUMIU20260226googlemdp.3901501542907290CH2902-5undbibUS bib date2 >= 1931MIUMIU20260305googlemdp.3901502235000691CH3042-9 19911991icbibUS serial item date >= 1931MIUMIU20260303googlemdp.3901502385722392CH3182-3 19921992icbibUS serial item date >= 1931MIUMIU20260305googlemdp.3901502655302793CH3337-3 19931993icbibUS serial item date >= 1931MIUMIU20260318googlemdp.3901503027435494CH3475-1 19941994icbibUS serial item date >= 1931MIUMIU20260227googlemdp.3901503484110995CH35811 19951995icbibUS serial item date >= 1931MIUMIU20260308googlemdp.3901503624037596CB35953 19961996icbibUS serial item date >= 1931MIUMIU20260316googlemdp.3901503622621897CB36089 19971997icbibUS serial item date >= 1931MIUMIU20260318googlemdp.3901504733645198CB36168 19981998icbibUS serial item date >= 1931MIUMIU20260305googlemdp.3901504739625799CB36295 19991999icbibUS serial item date >= 1931MIUMIU20260316googlemdp.3901504779645600CB37072 20002000icbibUS serial item date >= 1931MIUMIU20260225googlemdp.3901504911540801CH37160 20012001icbibUS serial item date >= 1931MIUMIU20260226googlemdp.3901504829728002CH37259undbibUS bib date2 >= 1931MIUMIU20260316googlemdp.3901504792536003CH37406undbibUS bib date2 >= 1931MIUMIU20260311googlemdp.3901505829205604CH37530undbibUS bib date2 >= 1931MIUMIU20260225googlemdp.3901505830131105CH37654 20052005icbibUS serial item date >= 1931