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‡b.A353 1988
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‡a621.3815/2
‡219
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‡aAdvanced Processing of Semiconductor Devices II :
‡b17-18 March 1988, Newport Beach, California /
‡cHarold G. Craighead, J. Narayan, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organization, the Metallurgical Society.
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260 |
⊔ |
⊔ |
‡aBellingham, Wash., USA :
‡bSPIE,
‡cc1988.
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300 |
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⊔ |
‡aviii, 164 p. :
‡bill. ;
‡c28 cm.
|
490 |
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‡aProceedings of SPIE--the International Society for Optical Engineering ;
‡vv. 945
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⊔ |
⊔ |
‡aIncludes bibliographies and indexes.
|
538 |
⊔ |
⊔ |
‡aMode of access: Internet.
|
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‡aSemiconductors
‡xDesign and construction
‡vCongresses.
|
700 |
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‡aNarayan, J.
‡q(Jagdish)
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⊔ |
‡aCraighead, Harold G.
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⊔ |
‡aMetallurgical Society (U.S.)
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⊔ |
‡aSociety of Photo-optical Instrumentation Engineers.
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