Micromachining of elements with optical and other submicrometer dimensional and surface specifications :
2-3 April 1987, the Hague, the Netherlands /
M. Weck, chair/editor ; organized by ANRT--Association nationale de la recherche technique, SPIE--the International Society for Optical Engineering ; cooperating sponsors, Comité Belge d'Optique ... [et al.].
Description
- Language(s)
-
English
- Published
-
Bellingham, Wash., USA : The Society, c1987.
- Physical Description
-
viii, 159 p. :
ill. ;
28 cm.
- ISBN
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0892528389
Viewability