Advanced processing of semiconductor devices :
23-25 March,1987, Bay Point, Florida /
Sayan D. Mukherjee editor ; sponsored by SPIE-the International Society for Optical Engineering ; coopertating sponsor, the Metallurgical Society.
APA Citation
Mukherjee, S. D., Society of Photo-optical Instrumentation Engineers., Metallurgical Society (U.S.). (1987). Advanced processing of semiconductor devices: 23-25 March,1987, Bay Point, Florida. Bellingham, Wash., USA: SPIE--the International Society for Optical Engineering.
MLA Citation
Mukherjee, Sayan D, Society of Photo-optical Instrumentation Engineers, and Metallurgical Society (U.S.). Advanced Processing of Semiconductor Devices: 23-25 March,1987, Bay Point, Florida. Bellingham, Wash., USA: SPIE--the International Society for Optical Engineering, 1987.
Warning: These citations may not always be complete (especially for serials).