| LDR | 01313nam a22002891a 4500 | ||
| 001 | 000869068 | ||
| 003 | MiAaHDL | ||
| 005 | 20210817000000.0 | ||
| 006 | m d | ||
| 007 | cr bn ---auaua | ||
| 008 | 880908s1987 waua b 10100 eng d | ||
| 010 | ⊔ | ⊔ | ‡a87061010 |
| 020 | ⊔ | ⊔ | ‡a0-89252-832-x |
| 035 | ⊔ | ⊔ | ‡a(MiU)990008690680106381 |
| 035 | ⊔ | ⊔ | ‡asdr-miu.990008690680106381 |
| 035 | ⊔ | ⊔ | ‡a(OCoLC)16843488 |
| 035 | ⊔ | ⊔ | ‡a(CaOTULAS)175696626 |
| 035 | ⊔ | ⊔ | ‡a(RLIN)MIUG88-B13979 |
| 035 | ⊔ | ⊔ | ‡z(MiU)Aleph000869068 |
| 040 | ⊔ | ⊔ | ‡dCMfNASA ‡dNNC ‡dIaU ‡dMiU |
| 245 | 0 | 0 | ‡aAdvanced processing of semiconductor devices : ‡b23-25 March,1987, Bay Point, Florida / ‡cSayan D. Mukherjee editor ; sponsored by SPIE-the International Society for Optical Engineering ; coopertating sponsor, the Metallurgical Society. |
| 260 | ⊔ | ⊔ | ‡aBellingham, Wash., USA : ‡bSPIE--the International Society for Optical Engineering, ‡cc1987. |
| 300 | ⊔ | ⊔ | ‡ax, 366 p. : ‡bill. ; ‡c28 cm. |
| 490 | 0 | ⊔ | ‡aPreceedings of SPIE--the International Society for Optical Engineering ; ‡vv. 797 |
| 504 | ⊔ | ⊔ | ‡aIncludes bibliographies and index. |
| 538 | ⊔ | ⊔ | ‡aMode of access: Internet. |
| 650 | ⊔ | 0 | ‡aSemiconductors ‡xTesting ‡xCongresses. |
| 650 | ⊔ | 0 | ‡aSemiconductors ‡vCongresses. |
| 700 | 1 | ⊔ | ‡aMukherjee, Sayan D. |
| 710 | 2 | ⊔ | ‡aSociety of Photo-optical Instrumentation Engineers. |
| 710 | 2 | ⊔ | ‡aMetallurgical Society (U.S.) |
| CID | ⊔ | ⊔ | ‡a000869068 |
| DAT | 0 | ⊔ | ‡a20020516000000.0 ‡b20210817000000.0 |
| DAT | 1 | ⊔ | ‡a20210929060714.0 ‡b2024-10-10T17:39:42Z |
| DAT | 2 | ⊔ | ‡a2024-10-10T17:30:01Z |
| CAT | ⊔ | ⊔ | ‡aSDR-MIU ‡dALMA ‡lprepare.pl-004-008 |
| FMT | ⊔ | ⊔ | ‡aBK |
| HOL | ⊔ | ⊔ | ‡0sdr-miu.990008690680106381 ‡aMiU ‡bSDR ‡cMIU ‡pmdp.39015012684406 ‡sMIU ‡1990008690680106381 |
| 974 | ⊔ | ⊔ | ‡bMIU ‡cMIU ‡d20241010 ‡sgoogle ‡umdp.39015012684406 ‡y1987 ‡ric ‡qbib ‡tUS bib date1 >= 1929 |