Microelectronics processing :
inorganic materials characterization /
Lawrence A. Casper, editor ; developed from a symposium sponsored by the Division of Industrial and Engineering Chemistry of the American Chemical Society.

APA Citation

Casper, L. A., American Chemical Society. Division of Industrial and Engineering Chemistry. (1986). Microelectronics processing: inorganic materials characterization. Washington, DC: American Chemical Society.

MLA Citation

Casper, L. A, and American Chemical Society. Division of Industrial and Engineering Chemistry. Microelectronics Processing: Inorganic Materials Characterization. Washington, DC: American Chemical Society, 1986.

Warning: These citations may not always be complete (especially for serials).