Journal of vacuum science & technology. A, An international journal devoted to vacuum, surfaces, and films : JVST A

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037 ‡bJournal of Vacuum Science & Technology, 100 Park Dr., Ste. 105, Research Triangle Park, NC 27709
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130 0 ‡aJournal of vacuum science & technology. ‡nA, ‡pInternational journal devoted to vacuum, surfaces, and films
210 0 ‡aJ. vac. sci. technol. A, int. j. devot. vac. surf. films
222 0 ‡aJournal of vacuum science & technology. A, An international journal devoted to vacuum, surfaces, and films
245 1 0 ‡aJournal of vacuum science & technology. ‡nA, ‡pAn international journal devoted to vacuum, surfaces, and films : ‡bJVST A
246 1 8 ‡aJVST A. ‡pVacuum, surfaces, and films
246 3 0 ‡aVacuum, surfaces, and films
246 3 0 ‡aInternational journal devoted to vacuum, surfaces, and films
246 3 0 ‡aJVST A
246 3 ‡aJournal of vacuum science and technology. ‡nA, ‡pInternational journal devoted to vacuum, surfaces, and films
260 ‡aNew York : ‡bPublished by AVS through the American Institute of Physics, ‡c2003-
300 ‡av. : ‡bill. ; ‡c29 cm
310 ‡aBimonthly
362 0 ‡a2nd ser., v. 21, no. 1 (Jan./Feb. 2003)-
538 ‡aMode of access: Internet.
650 0 ‡aVacuum technology ‡vPeriodicals
690 ‡aElectronic journals ‡xPhysical sciences and engineering
690 ‡aElectronic journals ‡xEngineering and technology
690 ‡aElectronic journals ‡xMechanical engineering
710 2 ‡aAmerican Institute of Physics
710 2 ‡aAmerican Vacuum Society
776 0 8 ‡iOnline version: ‡tJournal of vacuum science & technology. A, International journal devoted to vacuum, surfaces, and films (Online) ‡x1944-2807 ‡w(DLC) 2006263248 ‡w(OCoLC)75506113
780 0 0 ‡tJournal of vacuum science & technology. A, Vacuum, surfaces, and films ‡x0734-2101 ‡w(DLC) 83643441 ‡w(OCoLC)8697396
793 0 ‡aAmerican Institute of Physics online journals. ‡ga
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